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Optical Lens Scanner with Electrostatic Comb Drive Micro Actuator
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- TAKAHASHI Kazuhiro
- IIS, The University of Tokyo
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- SARUTA Kunihiko
- IIS, The University of Tokyo
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- MITA Makoto
- Japan Aerospace Exploration Agency
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- FUJITA Hiroyuki
- IIS, The University of Tokyo
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- TOSHIYOSHI Hiroshi
- IIS, The University of Tokyo
Bibliographic Information
- Other Title
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- 櫛歯型静電マイクロアクチュエータによるレンズ光スキャナの検討
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Journal
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- 電気学会研究会資料. MSS, マイクロマシン・センサシステム研究会
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電気学会研究会資料. MSS, マイクロマシン・センサシステム研究会 2004 (16), 95-99, 2004-05-12
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Keywords
Details 詳細情報について
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- CRID
- 1573105975684748544
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- NII Article ID
- 10025659504
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- NII Book ID
- AA11471751
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- Text Lang
- ja
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- Data Source
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- CiNii Articles
