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Polycrystalline Silicon Carbide Films for Piezoresistive Elements
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Journal
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- Sens. and Materials
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Sens. and Materials 2 207-216, 1991
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Details 詳細情報について
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- CRID
- 1573105976499294080
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- NII Article ID
- 80005686911
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- NII Book ID
- AA10790969
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- Data Source
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- CiNii Articles