A New Method for Phase Readout in Phase Modulated Interferometer

GE Zongtao, KIYONO Satoshi, NISHINO Yoichi

A New Method for Phase Readout in Phase Modulated Interferometer

参考文献10件

GE Zongtao

Department of Mechatronics, Faculty of Engineering, Tohoku University
KIYONO Satoshi

Department of Mechatronics, Faculty of Engineering, Tohoku University
NISHINO Yoichi

Department of Mechatronics, Faculty of Engineering, Tohoku University

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説明

A simple time-counting phase readout method for a sawtooth phase modulated interferometer is proposed. In this method, the measured phase is estimated from time intervals between zero points of only one modulated interference signal. A compact differential interferometer using a laser diode as the light source is described. The interferometer is calibrated with a capacitance-type displacement sensor by exploiting the advantages of a lever system, and some experimental results are presented.

収録刊行物

JSME international journal. Ser. C, Dynamics, control, robotics, design and manufacturing

JSME international journal. Ser. C, Dynamics, control, robotics, design and manufacturing 39 (3), 509-514, 1996-09-01

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