Silicon oxynitride : a versatile material for integrated optics applications
書誌事項
- 公開日
- 2002
収録刊行物
-
- J. Electrochemical Soc.
-
J. Electrochemical Soc. 149 (8), F85-F91, 2002
J. Electrochemical Soc. 149 (8), F85-F91, 2002