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Monolayer Nitridation of Si(001) Surfaces
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- MORITA Yukinori
- Joint Research Center for Atom Technology (JRCAT)
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- ISHIDA Takao
- National Institute of Advanced Industrial Science and Technology (AIST)
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- TOKUMOTO Hiroshi
- Joint Research Center for Atom Technology (JRCAT)
Search this article
Journal
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- Extended abstracts of the ... Conference on Solid State Devices and Materials
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Extended abstracts of the ... Conference on Solid State Devices and Materials 2001 230-231, 2001-09-25
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Details 詳細情報について
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- CRID
- 1573668924953017600
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- NII Article ID
- 10015752764
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- NII Book ID
- AA10777858
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- Text Lang
- en
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- Data Source
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- CiNii Articles
