ETCHING OF SILICON (100) AND (111) SURFACES IN HF SOLUTIONS : H-TERMINATION, ATOMIC STRUCTURE AND OVERALL MORPHOLOGY

1 Citations

Journal

Citations (1)*help

See more

Details 詳細情報について

  • CRID
    1573668925400609536
  • NII Article ID
    10022499638
  • Data Source
    • CiNii Articles

Report a problem

Back to top