Seismic Isolation System with Convertible Active and Passive Modes Using Linear Motors for Monocrystal Pullers

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Other Title
  • 246 リニアモータを用いた単結晶引上げ装置用アクティブ・パッシブ切換え型免震装置

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Description

This paper describes seismic isolation system for monocrystal pullers. In the monocrystal puller, a monocrystal is suspended by a wire through a very thin neck and grows longitudinally as it is pulled up very slowly from the molten material. The neck is easily broken due to collision between the monocrystal and the wall of the puller caused by even weak earthquakes. In this study, an active isolation system using linear motors has been developed because the linear motors are most suitable actuators for this purpose. Through shake table tests, is was shown that the active isolation system could effectively reduce the displacement of the monocrystal model.

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Details 詳細情報について

  • CRID
    1573668926958542848
  • NII Article ID
    110002483219
  • NII Book ID
    AA11901770
  • ISSN
    13480235
  • Text Lang
    ja
  • Data Source
    • CiNii Articles

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