Novel Three-Dimensional Positioner and Scanner for the STM Using Shear Deformation of Piezoceramic Plates

被引用文献3件
  • Uozumi Kiyohiko
    Department of Physics, College of Science and Engineering, Aoyama Gakuin University
  • Nakamoto Keiichi
    Department of Physics, College of Science and Engineering, Aoyama Gakuin University
  • Fujioka Kageaki
    Department of Physics, College of Science and Engineering, Aoyama Gakuin University

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説明

A new type of coarse and fine positioner of an STM tip has been developed. The xy-walker has three pairs of composite legs which are made of thickness expansion and thickness shear piezoelectric plates. While one of each pair of legs shrinks, the other leg expands and shear deforms giving rise to one-step displacement. The same type of z-walker is placed on the xy-walker. The position of the tip is finely controlled by shear deformation of the expanded legs. Two pieces of thickness shear piezo plates and a thickness expansion one are stacked for a rigid scanner. Atomic resolution of the STM unit has been confirmed on an air-cleaved MoS2 surface.

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詳細情報 詳細情報について

  • CRID
    1573668927104207104
  • NII論文ID
    110003927767
  • NII書誌ID
    AA10650595
  • 本文言語コード
    en
  • データソース種別
    • CiNii Articles

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