An Electrostatic Micro Actuator for a Magnetic Head Tracking System of Hard Disk Drives
収録刊行物
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- Proc.of the 3rd France-Japan/1st Europe-Asia Congress on Mechatronics,Besancon
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Proc.of the 3rd France-Japan/1st Europe-Asia Congress on Mechatronics,Besancon 2 778-, 1996