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Accurate three-dimensional simulation of damage caused by ion implantation
Journal
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- Proc. 2nd Int. Conf. on Modeling and Simulation of Microsystems
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Proc. 2nd Int. Conf. on Modeling and Simulation of Microsystems 363-366, 1999
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Details 詳細情報について
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- CRID
- 1573950399236598144
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- NII Article ID
- 10006478310
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- Data Source
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- CiNii Articles