New doping method for subhalf micron trench sidewall by using an electron cyclotron resonance plasma
書誌事項
- 公開日
- 1988
収録刊行物
-
- Appl. Phys Lett.
-
Appl. Phys Lett. 53 2059-, 1988
Appl. Phys Lett. 53 2059-, 1988