Improvement of a One-Chip-Style Quartz Crystal Motion Sensor for Detection of Angular Velocity and Acceleration
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- KOITABASHI Tatsuo
- Industrial Research Institute of Nagano Prefecture
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- KUDO Seiichi
- Industrial Research Institute of Nagano Prefecture
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- OKADA Shigeya
- MicroStone Co., Ltd.
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- TOMIKAWA Yoshiro
- Graduate Program of Human Sensing and Functional Sensor Engineering Yamagata University
Bibliographic Information
- Other Title
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- Improvememt of a One-Chip-Style Quartz Crystal Motion Sensor for Detection of Angular Velocity and Acceleration
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Journal
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- Japanese Journal of Applied Physics Pt. 1 Regular Papers, Short Notes & Review Papers
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Japanese Journal of Applied Physics Pt. 1 Regular Papers, Short Notes & Review Papers 41 (5), 3403-3408, 2002-05-30
The Japan Society of Applied Physics