A multiple imaging system using holographic optical element for laser machining

SASAGAWA Tomohiro

Bibliographic Information

Other Title

ホログラフィック光学素子を用いたレーザ加工光学系

Description

We propose a novel excimer laser machining using a multiple imaging system employing a holographic optical element (HOE). The HOFs that we used were computer generated phase holograms. We calculated the HOE by with three-step optimization using a direct binary search algorithm. The optimized HOE pattern was 4-level, and the matrix size was 1024×1024 with 1 micron pixels. With the use of this HOE, the 95 holes whose diameter was 0.1 mm were drilled in a 10×10 mm area. The energy availability was 19.4%.

Journal

IEICE technical report. Electronic information displays

IEICE technical report. Electronic information displays 97 (90), 1-6, 1997-06-10

The Institute of Electronics, Information and Communication Engineers

Keywords

Details 詳細情報について

CRID: 1573950402159708928

NII Article ID: 110003268677

NII Book ID: AN10060775

Text Lang: ja

Data Source

CiNii Articles

Export

Report a problem