Effect of Magnetic Mirror Plasma Confinement on Microwave Electron Cyclotron Resonance/D.C. Discharge for Low Pressure Sputtering(Physics, Process, Instrument & Measurements)

IR

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Journal

  • Transactions of JWRI

    Transactions of JWRI 24 (2), 11-16, 1995-12

    Welding Research Institute Osaka University

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