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CI-2-6 SiC-based Engineering Substrates by Bonding Different Types of Materials
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- Uchida Hidetsugu
- SICOXS CORPORATION
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- Hatta Naoki
- SICOXS CORPORATION
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- Minami Akiyuki
- SICOXS CORPORATION
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- Sakata Toyokazu
- SICOXS CORPORATION
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- Kawahara Takamitsu
- SICOXS CORPORATION
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- Yagi Kuniaki
- SICOXS CORPORATION
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- Kobayashi Motoki
- SICOXS CORPORATION
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- Okuda Takafumi
- Kyoto University
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- Suda Jun
- Kyoto University
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- Kurashima Yuichi
- National Institute of Advanced Industrial Science and Technology
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- Takagi Hideki
- National Institute of Advanced Industrial Science and Technology
Bibliographic Information
- Other Title
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- CI-2-6 異種材料接合によるSiC系エンジニアリングサブストレート(CI-2.異種材料融合デバイス技術の新展開-エピから貼り合わせまで,依頼シンポジウム,ソサイエティ企画)
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Journal
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- Proceedings of the Society Conference of IEICE
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Proceedings of the Society Conference of IEICE 2015 (2), "SS-41"-"SS-42", 2015-08-25
The Institute of Electronics, Information and Communication Engineers
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Details 詳細情報について
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- CRID
- 1573950402639049984
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- NII Article ID
- 110009982698
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- NII Book ID
- AN10489017
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- Text Lang
- ja
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- Data Source
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- CiNii Articles
