Ion Irradiation Stimulated Crystal Nucleation in Amorphous Si on SiO_2

  • MIYAO Masanobu
    Department of Electronic Device Engineering, Kyushu University
  • TSUNODA Isao
    Department of Electronic Device Engineering, Kyushu University
  • SADOH Taizoh
    Department of Electronic Device Engineering, Kyushu University
  • KENJO Atsushi
    Department of Electronic Device Engineering, Kyushu University

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Details 詳細情報について

  • CRID
    1574231874957033216
  • NII Article ID
    10017198462
  • NII Book ID
    AA10777858
  • Text Lang
    en
  • Data Source
    • CiNii Articles

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