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Radio Frequency Excitation of Plasmas for a Plasma-Sputter-Type Negative Ion Source
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Journal
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- Annual Report of National Institute for Fusion Science
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Annual Report of National Institute for Fusion Science 320-,
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Details 詳細情報について
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- CRID
- 1574231877413329536
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- NII Article ID
- 120005961928
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- ISSN
- 09171185
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- Web Site
- http://hdl.handle.net/10655/1091
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- Text Lang
- en
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- Data Source
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- CiNii Articles