Quadrupled Compact Disk-Read Only Memory Fabricated Using UV Light Source

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  • Katsuda Shinichi
    Personal Computers & Communications Development Laboratories, NEC Corporation
  • Ishizuka Kenichi
    Personal Computers & Communications Development Laboratories, NEC Corporation
  • Ohmura Naoki
    Personal Computers & Communications Development Laboratories, NEC Corporation
  • Takahashi Junichi
    Personal Computers & Communications Development Laboratories, NEC Corporation
  • Yokota Hitoshi
    Functional Devices Research Laboratories, NEC Corporation
  • Yamada Kazuhiko
    Functional Devices Research Laboratories, NEC Corporation

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Description

Quadrupled compact disk-read only-memory (CD-ROM) mastering processes with a 363.8 nm UV light source have been developed. The UV light source exposure power for pit formation is less than that for the 457.9 nm conventional light source, because the photoresist exposure characteristic depends on light source wavelength. The fabricated disk exposed by EFM signals with doubled-linear-density CD format has a 0.8 μm track pitch and about 0.25 μm pit width. Under optimum fabrication exposure power for reduced crosstalk and better modulation amplitude, an excellent jitter value, 10 ns, is achieved for the quadrupled CD-ROM.

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