Surface analysis of Fe-Si-Al sputtered alloy films by conversion electron Mössbauer spectrometry
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説明
Fe-Si-Al alloy films were deposited on silicon wafers heated to various temperatures by DC Ar sputtering and the microstructure of the films was analyzed by CEMS. As-prepared films on cooled substrate contained superparamagnetic components in addition to magnetic components. The fine grains included yielded a random orientation of magnetic spins in the films. The spin orientation became perpendicular to the surface by annealing the sputtered films at more than 773 K. The magnetic fields in sputtered films on a heated substrate were parallel to the surface.
収録刊行物
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- Hyperfine Interactions
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Hyperfine Interactions 88 73-81, 1994-12-01
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