Nano-Structured Silicon-Based Films with Visible Light Emission Synthesized by Laser Ablation
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<jats:title>Abstract</jats:title><jats:p>Applying laser ablation technique, we have synthesized two types of SiO<jats:sub>2</jats:sub> films that include nanometer-sized Si particles. One is synthesized by alternative deposition of Si nanoparticles layers and SiO<jats:sub>2</jats:sub> layers. The synthesized film exhibits red photoluminescence (PL) with a peak energy below 1.5 eV. The other is synthesized by annealing at 1000°C of SiO<jats:sub><jats:italic>x</jats:italic></jats:sub> films, which are formed by laser ablation in diluted O<jats:sub>2</jats:sub> gas. We find that there is a narrow range of composition for efficient red PL. Based on the experimental results, we tentatively discuss a possible model for the origin of the red PL.</jats:p>
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- MRS Proceedings
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MRS Proceedings 452 1996-01-01
Springer Science and Business Media LLC