SOI-CMOS precision front-end amplifier for wide range and high temperature (200 °C) operation of smart microsensors

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Abstract In this paper, an SOI-CMOS precision front-end amplifier using autozeroing technique for wide range and high temperature operation of smart microsensors is presented. SOI-CMOS amplifiers can operate over 150 °C, while, temperature drift of offset voltage is a serious problem to be solved for precise signal detection. A new autozeroed circuit configuration with voltage-decay cancellation technique is applied to SOI-CMOS pre-amplifier for stabilization of offset voltage at high temperature environments. Voltage-decay due to leakage current from capacitor voltage memories is almost cancelled out in the SOI-CMOS amplifiers. Offset drift in the fabricated amplifier is well suppressed by the cancellation technique without any device trimming after circuit fabrication. Robustness and stability of the front-end amplifier for wide range and high temperature operation has been experimentally demonstrated up to 200 °C in this study.

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