Hybrid MEMS optical scanner for volumetric 3‐D displays
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説明
<jats:p><jats:bold>Abstract—</jats:bold> A fabrication technique and characteristics of high‐power‐handling microelectromechanical systems (MEMS) optical scanners for laser 3‐D volumetric‐image display application is reported. The MEMS scanner is designed to control the reflection of high‐power YAG‐laser beam by using the optomechanical combination of a dielectric‐film‐coated mirror cube and an electrostatic‐MEMS‐scanner platform. These hybrid‐type MEMS optical scanners have a stroke of about 20° at resonant frequencies of 600 Hz when a 45‐V pulse voltage is applied.</jats:p>
収録刊行物
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- Journal of the Society for Information Display
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Journal of the Society for Information Display 17 419-422, 2009-05-01
Wiley