Laser-induced damage of fluoride coatings for UV lasers
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説明
UV and DUV lasers are very important for many applications such as micro-machining, new material creation, medical care, and photo-lithography. Laser-induced damage of thin films coated on optical components used for UV and DUV lasers are serious problem. We have developed a new technique for producing anti- reflection (AR) coating on various substrate materials including fused silica glass and CaF2 crystal. In this technique, porous magnesium fluoride (MgF2) AR coating was developed. The reflectance of the porous AR coating on fused silica substrate was 0.3% at 500 nm.© (2001) COPYRIGHT SPIE--The International Society for Optical Engineering. Downloading of the abstract is permitted for personal use only.
収録刊行物
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- SPIE Proceedings
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SPIE Proceedings 4347 81-, 2001-04-12
SPIE