Development of Si Microliquid Processing using Piezo Actuator

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<jats:title>ABSTRACT</jats:title><jats:p>The tip of a Si rod was melted by laser diode (LD) irradiation and we succeeded in dropping small Si droplets by vibration of the Si rod using a piezo actuator. We confirmed multiple small Si droplets under a condition of the resonance frequency of 5.8 kHz for the rod length of 6.0 mm. We observed ejection of droplets from a cone edge of molten Si and the minimum width of the solidified Si was ∼ 1 μ m in diameter. The solidified Si show high crystallinity with the Raman scattering TO phonon band of 515.6 cm<jats:sup>-1</jats:sup>.</jats:p>

Journal

  • MRS Proceedings

    MRS Proceedings 1321 2011-01-01

    Springer Science and Business Media LLC

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