Measurement of sectional profile of a thread gauge using a sinusoidally vibrating light with sinusoidal intensity
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説明
A method is proposed for accurately measuring a sectional profile of a thread gauge. In this method a sinusoidally vibrating sinusoidal intensity (SVSI) is used to generate an exact spatial scale along one direction. Lights from top points of a thread gauge surface are extracted by spatial filtering in an afocal imaging system to form an image of the top points. A time-varying signal is detected in the image, and a sectional profile of the thread gauge is measured from the phase of the detected signal on a position where the amplitude of the signal has a maximum value. Detection of the amplitude and the phase is carried out easily and exactly with sinusoidal phase-modulating interferometry.
収録刊行物
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- SPIE Proceedings
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SPIE Proceedings 5633 17-, 2005-01-20
SPIE