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Microstructure on titanium oxide and silicon nitride formed by KrF excimer laser ablation
Description
We have created conical microstructures on sintered flat TiO/sub 2/ and Si/sub 3/N/sub 4/ by near-threshold KrF laser ablation. The surface morphology and the chemical composition were analyzed with SEM and XPS, respectively.
Journal
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- Technical Digest. CLEO/Pacific Rim 2001. 4th Pacific Rim Conference on Lasers and Electro-Optics (Cat. No.01TH8557)
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Technical Digest. CLEO/Pacific Rim 2001. 4th Pacific Rim Conference on Lasers and Electro-Optics (Cat. No.01TH8557) 1 I-32, 2002-11-13
IEEE