Physics and simulation of group-III-nitride-based moth-eye LEDs

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Group III nitride-based blue-light-emitting diodes having a moth-eye structure at the bottom of the semi-insulating transport 6H-SiC substrate were fabricated. The light extraction efficiency and the corresponding output power were increased 3.8 times compared with those of the LED having the conventional structure. We also study a theoretical simulation using based on the RCWA method with three-dimensional Maxwell's equations. The results of theoretical analysis agree with these findings.

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