Excimer lamp stereolithography

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説明

For the laser stereo-lithography, a XeCl excimer lamp with cylindrical tube has been adopted to achieve a lower cost type UV light source. Because of excellent high output efficiency, it is possible to be down sizing of a power supplier and a lamp head and to be air-cooling. And moreover to extract the maximum output power and efficiency, we applied an optical fiber system for its lithography optics. With this excimer lamp the maximum UV emission per pulse 25 (mu) J at 100 Hz and the maximum average power 10 mW at 1000 Hz were obtained.

収録刊行物

詳細情報 詳細情報について

  • CRID
    1870020693213309312
  • DOI
    10.1117/12.387563
  • ISSN
    0277786X
  • データソース種別
    • OpenAIRE

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