High frequency resonators with wide bandwidth using SH<inf>0</inf> mode plate wave in thin LiNbO<inf>3</inf>

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Currently, an ultrawide band resonator used for a tunable filter with a wide tunable range is strongly required, because a mobile phone with multi-bands and a cognitive radio system require such a tunable filter to simplify their wirelss front-end circuits. The authors developed resonators with ultrawide bandwidths of 26% to 29% and large impedance ratios of 92 to 98 dB between resonance (fr) and anti-resonance frequencies (fa) using a 0-th shear horizontal (SH0) mode plate wave in a 28-30°YX-LiNbO3 plate. However, the resonators were of low frequency as fr = 1.8 MHz and fa = 2.3 MHz and suffer from ripples due to transverse mode between fr and fa. In this study, high frequency SH0 mode plate wave resonators (fr = 440 ~ 560 MHz) with a wide bandwidth and a large impedance ratio and without ripples have been fabricated using an ultrathin LiNbO3 plate and an apodized interdigital transducer.

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