The synthesis of diamond particles by a filament assisted CO2 laser induced CVD
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説明
Abstract Diamond particles were synthesized by a filament assisted CO 2 laser induced CVD technique on a silicon substrate in a hydrogen environment. The deposition was carried out using a gaseous mixture of CH 4 and H 2 , which flowed through a beam generator equipped with a tiny orifice and positioned above a refractory filament. The filament was separated 25 mm from the substrate and a cw-CO 2 laser was used to irradiate the substrate's surface. The presence of diamond particles on the substrate was confirmed by Raman Spectroscopy and Scanning Electron Microscope. The factors that hindered the synthesis of a continuous diamond film were investigated from the results of EDS, TEM analysis, HREM analysis, and Electron Diffraction Patterns.
収録刊行物
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- Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms
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Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms 121 427-431, 1997-01-01
Elsevier BV
