A microplasma chip for radical monitor
説明
A chip device of generating atmospheric pressure microplasma was fabricated and characterized for light source in a radical monitoring system. The chip consisted of a Si substrate with channels and a lid of MgF2 glass plate with a floating electrode. The chip (20mm × 3mm) generated microplasma of φ200mm under the conditions of 20-40W VHF power and He gas flow of 500sccm. The microplasma emitted clear atomic spectral lines and molecular band spectra, which can be used as a light source in adsorption spectroscopy.
収録刊行物
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- 2013 International Conference on Optical MEMS and Nanophotonics (OMN)
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2013 International Conference on Optical MEMS and Nanophotonics (OMN) 43-44, 2013-08-01
IEEE
