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Electro-statically actuated light emitting device using OLED
Description
We propose a process of a light emitting device fabricated on the top surface of a micro structure. The proposed process has made it possible to fabricate light sources on silicon micro actuators released partly from the wafer. A light source is an Organic Light Emitting Diode (OLED) composed of electrodes and an organic layer evaporated on the top surface of a micro structure.
Journal
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- TRANSDUCERS '03. 12th International Conference on Solid-State Sensors, Actuators and Microsystems. Digest of Technical Papers (Cat. No.03TH8664)
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TRANSDUCERS '03. 12th International Conference on Solid-State Sensors, Actuators and Microsystems. Digest of Technical Papers (Cat. No.03TH8664) 2 1506-1509, 2004-05-06
IEEE