<title>Design of an EUV spectrometer with stigmatic image focusing using spherical varied line-space gratings</title>

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A method of designing spectrometers having stigmatic image focusing properties by using spherical varied line-space (SVLS) grating is developed and is compared with toroidal uniform line-space (TULS) grating design. Helium emission sensors using concave grating spectrometers are designed to detect 30.4 nm and 58.4 nm EUV emissions. The SVLS design is found to be superior to the TULS design not only theoretically in stigmatic image focusing properties, but also practically in the ease of fabrication.

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