Device-level APC in Ion Implantation for Analog Device
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説明
With the aim of achieving high accuracy for analog devices, we developed an advanced process control (APC) system for poly silicon resistance control in implantation steps. The effect of this system has been successfully demonstrated in our mass production. Moreover LP-CVD equipment for poly silicon deposition was enhanced with EES. This can improve the equipment fault detection ability for stabilizing this APC system.
収録刊行物
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- 2006 IEEE International Symposium on Semiconductor Manufacturing
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2006 IEEE International Symposium on Semiconductor Manufacturing 110-113, 2006-09-01
IEEE