<title>All-solid-state excitation circuit using saturable transformer for excimer laser excitation</title>

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To reduce the load on switching devices, a new type of all-solid-state excitation circuit has been successfully developed, where only one GTO thyristor is utilized in the switching device and a saturable transformer is used as the magnetic pulse compressor. We have used a saturable transformer with a winding ratio of 1:7. The initial pulse of 5.5 kV, 1.7 kA, 1.0 kA/microsecond(s) was transferred to the output pulse of 32.7 kV, 8.7 kA, 282 kA/ns. Employing this circuit for XeCl-excimer laser, we have succeeded in lasing the output energy of approximately 30 mJ/pulse.

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