Negative- and positive-temperature dependences of electron emission properties of hydrogen- and oxygen-terminated diamond field emitters
説明
Temperature dependence of the electron emission properties of boron doped diamond thin film field emitters was investigated. We prepared both hydrogen- and oxygen-terminated diamond films with different boron concentrations. The oxygen-terminated emitters showed an enhanced emission current with an increase in the temperature. On the contrary, the hydrogen-terminated emitters showed a lowered emission current. These tendencies were observed irrespective of the boron concentration. The results suggested that the surface dipole greatly contributes to the emission property and the dipole moment is sensitive to the temperature.
収録刊行物
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- IVMC 2001. Proceedings of the 14th International Vacuum Microelectronics Conference (Cat. No.01TH8586)
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IVMC 2001. Proceedings of the 14th International Vacuum Microelectronics Conference (Cat. No.01TH8586) 297-298, 2002-11-13
IEEE