Effect of Nitrous Oxide Gas on Cvd Diamond Film Deposition
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説明
<jats:title>ABSTRACT</jats:title><jats:p>The addition of nitrous oxide (N<jats:sub>2</jats:sub>O) gas in the hot-filament chemical vapor deposition of carbon film from mixtures of methane and hydrogen was found to increase remarkably the content of diamond structure in the film. Increased particle size and crystal orientation parallel to the (111) direction were also obtained by the N<jats:sub>2</jats:sub>O addition. Mass spectrometry revealed that the vapor phase reaction was scarcely affected by the N<jats:sub>2</jats:sub>O addition.</jats:p>
収録刊行物
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- MRS Proceedings
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MRS Proceedings 180 1990-01-01
Springer Science and Business Media LLC