LC filter‐type magnetoimpedance sensors with multilayer film structure

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<jats:title>Abstract</jats:title><jats:p>We have investigated the basic characteristics and applicability of the <jats:italic>LC</jats:italic> high pass filter configuration for signal conditioning of the magnetoimpedance (MI) sensor. The MI sensor elements were fabricated through photolithography and lift‐off process of CoZrNb/Au/CoZrNb multilayer, and the <jats:italic>LC</jats:italic> high pass filters were configured using the fabricated sensor elements and surface mount capacitors. To confirm the high frequency performance of the sensor elements, frequency dependence of the impedance was measured as function of external magnetic field using a network analyzer. The output increased to reach the peak value with increase of magnetic field to around 20 Oe, which was almost the same with the anisotropic field of the multilayer film pattern, and the measured maximum change ratio is 49%. (© 2008 WILEY‐VCH Verlag GmbH & Co. KGaA, Weinheim)</jats:p>

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