MEMS-based handheld single-axis confocal microscope design and experiment

Description

We demonstrate an optical configuration of MEMS based a single-axis confocal microscope imaging setup with 12.7 millimeters diameter commercial lenses. The configuration deploys lens models of optical design software, ZEMAX, to predict optical performance of the actual imaging setup. With this optical design, the maximum field of view is 150 µm × 30 µm with 11.96 µm transverse resolutions and 1.98 mm axial resolution.

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