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説明
<jats:title>ABSTRACT</jats:title><jats:p>Vacuum packaging is a very important issue for vacuum microelectronics devices, especially for field emission displays. Emission current from the field emitter array (FEA), however, is known to decrease significantly after the vacuum packaging process. The current decrease is caused by heating treatment in the vacuum sealing process. In the present paper, the effect of the heating treatment on Si FEA was investigated and CHF<jats:sub>3</jats:sub> plasma treatment was proposed for avoiding the problem. The Si FEA was exposed to plasma for 15sec and emission characteristics were measured before and after the vacuum sealing process using frit. It was confirmed that CHF<jats:sub>3</jats:sub> plasma treatment was very effective for avoiding the emission degradation of the Si FEA. Details of the heating damage and CHF<jats:sub>3</jats:sub> plasma treatment are described.</jats:p>
収録刊行物
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- MRS Proceedings
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MRS Proceedings 621 2000-01-01
Springer Science and Business Media LLC