<title>Surface reactions responsible for atmosphere-sensitive characteristics of alternate-supply OMVPE growth of ZnSe</title>
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説明
An insight into surface chemical reactions responsible for organometallic vapor phase epitaxial growth of ZnSe under alternate supply of diethylzinc and dimethylselenium was provided by findings in laser-assisted free-radical doping experiments. Based on ab initio molecular orbital analyses, atmosphere-sensitive characteristics of the ZnSe growth were attributed to differences in the pathways and the corresponding adiabatic potential barriers between diethylzinc chemisorption onto hydrogen- and methyl-terminated Se-stabilized ZnSe surfaces.© (2004) COPYRIGHT SPIE--The International Society for Optical Engineering. Downloading of the abstract is permitted for personal use only.
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- SPIE Proceedings
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SPIE Proceedings 412-415, 2004-10-08
SPIE