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Generation of microdischarge in vacuum by CO/sub 2/ gas introduction
Description
Measurements of microdischarge current waveforms have been made in a vacuum of 3x10/sup -4/ Pa after CO/sub 2/ is introduced into the vacuum chamber. The onset of microdischarge occurred when the voltage between the electrodes exceeded a threshold voltage, and the peak current of the microdischarge increased with increasing CO/sub 2/ pressure. The number of ions which transferred the microdischarge current and the number of molecules which were adsorbed on the electrode surface were compared. A microdischarge model is proposed to explain the experimental results.
Journal
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- Conference Record of the 1988 IEEE International Symposium on Electrical Insulation
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Conference Record of the 1988 IEEE International Symposium on Electrical Insulation 104-107, 2003-01-06
IEEE
