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Observation of 2in SiC Wafer by SWBXT at SPring-8
Journal
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- Materials Science Forum
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Materials Science Forum 389-393 411-414, 2002-04-01
Trans Tech Publications, Ltd.
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Details 詳細情報について
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- CRID
- 1870865117854256384
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- ISSN
- 16629752
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- Data Source
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- OpenAIRE
