Nano-metal-ink-based electrode embedded in parylene HARS with the aid of the capillary effect
説明
Microfabrication technology for free-standing parylene high-aspect-ratio structures (HARS) with embedded electrodes has been developed. Nano- metal ink is infused into capillaries in parylene HARS using the surface tension force. Micro electrodes in complex parylene springs have been successfully developed, and their robustness is demonstrated under large-amplitude in-plane vibration of the springs.
収録刊行物
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- 2007 IEEE 20th International Conference on Micro Electro Mechanical Systems (MEMS)
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2007 IEEE 20th International Conference on Micro Electro Mechanical Systems (MEMS) 313-316, 2007-01-01
IEEE
