Micro-patterned electret for high power electrostatic motor
説明
This paper describes the charging method of a micro-patterned electret for a high power electrostatic motor. By applying contact electrification using mercury to electret charging, charging to 5 /spl mu/m-wide micro-patterned electret was achieved. But, 0.9 /spl mu/m-wide edges of the electret is not charged due to discharge at the edges. Using this method, a silicon-dioxide electret with 0.5 /spl mu/m thickness was charged up to a charge density of about -100 V//spl mu/mSiO/sub 2/ with fair repeatability.
収録刊行物
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- 17th IEEE International Conference on Micro Electro Mechanical Systems. Maastricht MEMS 2004 Technical Digest
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17th IEEE International Conference on Micro Electro Mechanical Systems. Maastricht MEMS 2004 Technical Digest 470-473, 2004-08-02
IEEE
