General-purpose simulator for leaky surface acoustic wave devices based on coupling-of-modes theory
説明
The paper describes the development of a general-purpose simulator for high performance leaky surface acoustic wave (LSAW) devices. The derivation of the coupling-of-modes (COM) parameters for the simulator is based on a method developed originally for surface transverse wave devices: the method can skillfully takes the effect of back-scattered bulk acoustic waves into consideration. All the COM parameters for the analysis are determined as a function of electrode thickness, and the simulation itself is carried out in exactly the same may with the conventional COM analysis. A ladder-type LSAW filter on 36/spl deg/YX-LiTaO/sub 3/ and an interdigitated-interdigital transducer type filter employing longitudinal-type LSAWs on (011)-Li/sub 2/B/sub 4/O/sub 7/ are analysed, which concludes how effectively the developed simulator is applicable to assessing LSAW device performances, present simulator is demonstrated.
収録刊行物
-
- 1996 IEEE Ultrasonics Symposium. Proceedings
-
1996 IEEE Ultrasonics Symposium. Proceedings 1 117-122, 2002-12-24
IEEE