MEMS Mirror Controlling System with Holed-PSD
説明
In this study, we developed a precise 2D MEMS (Micro Electro Mechanical Systems) mirror control system. The system comprises a two-sided mirror and rectangular shaped springs that fabricated on a silicon-on-insulator (SOI) wafer. The mirror movement is detected by a specialized holed position sensitive device (H-PSD), and is proportional-integral derivative (PID) controlled by a microcontroller (MCU). We also discuss an application of an optical laser projector that can depict an arbitral figures on the screen.
収録刊行物
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- 2010 3rd International Conference on Emerging Trends in Engineering and Technology
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2010 3rd International Conference on Emerging Trends in Engineering and Technology 446-449, 2010-11-01
IEEE