Laser moire topography for 3-D contour measurement

DOI

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説明

The use of the phase shifting interferometric technique is discussed to make quantitative surface profiling using the Nomarski differential interference microscope. Lateral shift of the Nomarski prism introduces mutual phase shift between interfering two wavefronts with small amount of shear. Since the analyzed phase distribution corresponds to the differential of the surface profile under test, integration of the phase distribution gives the correct surface topography. The procedure for an analysis method and experimental results are presented.

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詳細情報 詳細情報について

  • CRID
    1871146592529449728
  • DOI
    10.1117/12.51101
  • ISSN
    0277786X
  • データソース種別
    • OpenAIRE

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