Sb Implantation at High Dose and Medium Energy in SAion
説明
In the SAion, a scanned beam system, Sb implantation at high dose and medium energy was evaluated, and the SAion demonstrated standard process characteristics under the production-worthy beam current.
収録刊行物
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- 2018 22nd International Conference on Ion Implantation Technology (IIT)
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2018 22nd International Conference on Ion Implantation Technology (IIT) 78-81, 2018-09-01
IEEE