Improvement of sensing and actuating property of parallel beam gyroscope
説明
Parallel beam structure has many significant features as follows: the tip moves in parallel at the end; the structure converts small displacements into large strain; strain is concentrated at the boundary point between the parallel-beam part and the supporting part; interfere between the units is reduced; lateral rigidity is high. The authors propose this structure for the development of a piezoelectric vibrating gyroscope (angular rate sensor), and detection of the angular rate using this gyroscope. The method for super sensitizing by bringing two resonance frequencies (drive resonance frequency and sensing resonance frequency) close, is presented. A suppression method for mechanical coupling that arises by bringing two resonance frequencies close, is described. It is concluded that the structure described is suitable for the gyroscope.
収録刊行物
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- MHS'99. Proceedings of 1999 International Symposium on Micromechatronics and Human Science (Cat. No.99TH8478)
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MHS'99. Proceedings of 1999 International Symposium on Micromechatronics and Human Science (Cat. No.99TH8478) 249-254, 2003-01-22
IEEE